[{"data": {"name": "Modulated Pulse Power Sputtering Technology for Deposition of Al Doped ZnO Thin Film", "@type": "ScholarlyArticle", "genre": "journal-article", "author": [{"name": "Won-Kyun Yang", "@type": "Person"}, {"name": "Jung-Hoon Joo", "@type": "Person"}], "@context": "http://schema.org/", "encoding": [{"@type": "MediaObject", "contentUrl": "http://society.kisti.re.kr/sv/SV_svpsbs03V.do?method=download&cn1=JAKO201216539835034", "encodingFormat": "application/pdf"}], "publisher": {"name": "The Korean Institute of Surface Engineering", "@type": "Organization"}, "identifier": [{"@type": "PropertyValue", "value": "10.5695/jkise.2012.45.2.053", "propertyID": "DOI"}, {"@type": "PropertyValue", "value": "CCCFm2S7gU5nG-CTr5zwdv5sw2u-CDHNkgJNqSHco-CRbfK61GWevSp", "propertyID": "ISCC"}], "datePublished": "2012-04-30"}, "schema": "schema.org", "mediatype": "application/ld+json"}]