[{"data": {"name": "Gas Mixing rate Dependency of Electron Density Produced by UV Preionization in KrF Laser", "@type": "ScholarlyArticle", "genre": "journal-article", "author": [{"name": "Ken Yukimura", "@type": "Person"}, {"name": "Atsushi Sato", "@type": "Person"}], "@context": "http://schema.org/", "encoding": [{"@type": "MediaObject", "contentUrl": "https://www.jstage.jst.go.jp/article/ieejfms1990/115/12/115_12_1236/_pdf", "encodingFormat": "application/pdf"}], "publisher": {"name": "Institute of Electrical Engineers of Japan (IEE Japan)", "@type": "Organization"}, "identifier": [{"@type": "PropertyValue", "value": "10.1541/ieejfms1990.115.12_1236", "propertyID": "DOI"}, {"@type": "PropertyValue", "value": "CCdHXPLQaw6nW-CTi9XDhz9exmu-CDgECcNcsTvPM-CR23Stop1KQfi", "propertyID": "ISCC"}], "datePublished": "1995-01-01"}, "schema": "schema.org", "mediatype": "application/ld+json"}]